High-temp Ion Implanter for SiC
IH-860DSIC
Ion Implanter for mass production with high temperature ESC for SiC.
Ion Implanter for mass production with high temperature ESC for SiC.
Continuous high-temp implantation. |
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Up to 700keV. |
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Chain implantation by software. |
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Small footprint. |
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From R&D to mass production. |
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SiC devices. |
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