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Equipment
Ion Implantation System
Ion Implantation System
A high-performance ion implantation system series for semiconductor devices.
Low-acceleration and High-density Ion Implanter SOPHI-30
Medium Current Ion Implanter SOPHI-200/260
High-energy Ion Implanter SOPHI-400
High-temp Ion Implanter for SiC IH-860DSIC
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Ion Implantation System
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