High Performance Process

Qulee HGM2 Series

HGM2-202 HGM2-302

ULVAC's new "Qulee HGM2" residual gas analyzer series with revolutionary simplicity of use.

Offers highest sensitivity of all models at 2.5 x 10-6 A/Pa, Qulee HGM2.

Can meet the needs of various R&D and other vacuum systems process monitoring. (Ethernet compatible).


Most Appropriate for R&D Applications. Offers highest sensitivity 2.5 x 10-6 A/Pa (3.3 x 10-4 A/Torr, 2.5 x 10-4 A/mbar).

Communication interface. Ethernet compatible.

Integrated Display. No need for PC.

Simple Operation. "One Click" function.

Bake Out. Max 250°C (482°F) high temperature bake (300°C (572°F) when the sensors are removed).

Degas Function. Electron bombard degas.

Maintenance. Filament, ion source, and secondary electron multiplier are easy to replace.

Protection and Maintenance Features. The unit offers protection and maintenance of ion source and secondary electron multiplier. Traceability of analysis tube (Japanese Patent No. 5016031).

Various Leak Tests are Available. Helium leak test, air leak test, leak up.

Total Pressure Measurement. Capable of total pressure measurement (ionization gauge).

Qulee QCS is Included. This software is compatible with (Windows 8/10/11).

Applicable Standard. Conforms with CE.



R&D such as thermal desorption gas analysis.

Residual gas analysis for ultra-high vacuum pumping equipment, etc.

Trace impurities in gas.

R&D for photovoltaic field.

Analysis of organic compound.

Environmental measurements.


Contact us for more product information and specifications.


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