Gas Analyzer (Process Gas Monitor)

Qulee (pronounced as KLEE) is ULVAC's latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1 Pa) order the simple (easy) to use Qulee today.

Qulee Series

High Pressure Process

Atmospheric Pressure Environmental Process

CVD / ALD / Etching Process

Software for Gas Analysis

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