Gas Analyzer (Process Gas Monitor)

Qulee (pronounced as KLEE) is ULVAC's latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1 Pa) order the simple (easy) to use Qulee today.



Qulee Series



High Pressure Process



Atmospheric Pressure Environmental Process



CVD / ALD / Etching Process



Software for Gas Analysis






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