Sputtering Process

Qulee CGM2 Series

CGM2-051 CGM2-052 CGM2-101 CGM2-102

The "Qulee" (pronounced "KLEE") is ULVAC's latest model for residual gas analysis and gas monitoring during the process.

Feedback from equipment engineers on each production line has been incorporated into the new product design in pursuit of simplicity.

Measurements can be made with high accuracy at the process pressure of the sputtering equipment (less than 1 Pa) without using a differential exhaust system.


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Ideal for process monitoring of various sputtering systems.

Monitoring the air Leak.

Management of residual moisture.

Cleaning fluid residue.

Galden® and other gas leaks.

Monitoring of residual hydrocarbons

No differential pumping system is required (less than 1 Pa at 7.5 x 10-3 Torr / 1 x 10-2 mbar).

Built-in display, PC-free.

Highly sensitive leak test is possible (CGM2-052).

Various leak tests are available (Helium leak test, air leak test, assembly test).

Total pressure measurement (ionization gauge) is possible.

Includes a Quick Install Package system (QIP). Automatic measurement package (see option catalog for details)

Qulee QCS is Included. This software is compatible with (Windows 8/10/11).

Conforms with CE.



Ideal for residual gas analysis, process monitoring and impurity (H2O, etc) management of sputtering equipment.

For leak testing of sputtering equipment.


Contact us for more product information and specifications.


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