Ideal for process monitoring of various sputtering systems.

Monitoring the air Leak.

Management of residual moisture.

Cleaning fluid residue.

Galden® and other gas leaks.

Monitoring of residual hydrocarbons

No differential pumping system is required (less than 1 Pa at 7.5 x 10^-3 Torr / 1 x 10^-2 mbar).

Built-in display, PC-free.

Highly sensitive leak test is possible (CGM2-052).

Various leak tests are available (Helium leak test, air leak test, assembly test).

Total pressure measurement (ionization gauge) is possible.

Includes a Quick Install Package system (QIP). Automatic measurement package (see option catalog for details)

Qulee QCS is Included. This software is compatible with (Windows 8/10/11).

Conforms with CE.

Ideal for residual gas analysis, process monitoring and impurity (H2O, etc) management of sputtering equipment.

For leak testing of sputtering equipment.