Vacuum Pumping System

VPT Series


A dry, compact, high-vacuum exhaust system in which the necessary equipment such as turbo molecular pump, dry vacuum pump, valve piping, and electrical system is compactly configured in a base frame.

Suitable for clean vacuum environments in semiconductor, analysis, inspection, science and chemistry, and pharmaceutical fields.


It is a completely dry exhaust unit.

The setup space is compact.


Contact us for more product information and specifications.


2024 ULVAC Singapore Pte Ltd. All rights reserved.