High Vacuum Pump

ULVAC vacuum pumps are developed based on abundant technology and experience in the vacuum field. We have a lineup of vacuum pumps for all areas, conditions, and applications such as Turbo Molecular Pumps, Cryopumps and Sputter Ion Pumps.

Cryo Pump

Super Trap

Turbo Molecular Pump

Ion Pump

Oil Diffusion Ejector Pump

Vacuum Pumping System

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