Preparing various models according to the application.
The back pump can be selected from a rotary pump as a standard specification or a dry scroll pump as the other selection.

Adopting a superior power failure countermeasure function.
A solenoid valve is equipped as standard on the fore valve to prevent reverse flow and failure at power failure.

Possible to check the pressure during rough vacuum pumping due to the Pirani vacuum gauge is equipped as a standard part.

Vacuum pumping to the Ultra High Vacuum area is possible.
Designed for easy integration of up to 2 vacuum gauges.

Evacuation system from atmospheric pressure to high vacuum.

Evacuation system of various experiments and R&D equipment.

Vacuum substitution of high-purity gas.

Roughing evacuation system of UHV (Ultra High Vacuum) system.

Evacuation system of analytical equipment.