Controller integrated with the pump body.
No wiring work between the pump body and the controller.

Free mounting direction.
Free mounting direction makes the system design flexibility.

Pumping speed from 1000L/s to 4000L/s class.

Wide range and high flow for the light processes.

Pump rotation variable from 25% to 100%.
Enabling the pressure adjustment in a chamber.

High durability and safety.
Safety confirmation tests are passed, such as air rushing-in test and touch-down test.

Main vacuum pumping system for equipment.

Semiconductor equipment.

Evaporator, sputtering system.

Analytical equipment, experimental devices, etc.

Main vacuum pumping system for the light processes that do not generate side reaction products.

Replacement from oil diffusion pumps.

General use for high vacuum evacuation system.