The compound turbo molecular pump with ceramic ball bearings, and has excellent compression ratio.
Compact design by integrated controller design.
Excellent high back pressure performance allows using a smaller backing pump.
No limitation in the mounting direction The degree of freedom in system design is high because of the free mounting direction. |
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On-board controller Integrated controller to the pump body is capable to reduce wire work and downsize the pumping system. |
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High compression ratio and high back pressure High compression ratio made it possible to run the pump at high back pressure and downsize its backing pump. |
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Three kinds of flange Inlet port flange is selectable from ISO100-K, ICF152, and VG100. |
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Clean vacuum environment Less backflow of hydrocarbon gases while both the pump is running and stopping. |
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Low noise level at the no load is 50dB or less (with ISO-100K flange). |
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Applicable standard CE and NRTL. |
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Main pumping system for analytical equipments, R&D systems, experimental devices, etc. |
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Main pumping system for evaporators and sputtering systems, etc. |
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Main pumping system to evacuate low molecule gases such as H2, He. |
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