Turbo Molecular Pump

UTM-B Series


The compound turbo molecular pump with ceramic ball bearings, and has excellent compression ratio.

Compact design by integrated controller design.

Excellent high back pressure performance allows using a smaller backing pump.


No limitation in the mounting direction The degree of freedom in system design is high because of the free mounting direction.

On-board controller Integrated controller to the pump body is capable to reduce wire work and downsize the pumping system.

High compression ratio and high back pressure High compression ratio made it possible to run the pump at high back pressure and downsize its backing pump.

Three kinds of flange Inlet port flange is selectable from ISO100-K, ICF152, and VG100.

Clean vacuum environment Less backflow of hydrocarbon gases while both the pump is running and stopping.

Low noise level at the no load is 50dB or less (with ISO-100K flange).

Applicable standard CE and NRTL.



Main pumping system for analytical equipments, R&D systems, experimental devices, etc.

Main pumping system for evaporators and sputtering systems, etc.

Main pumping system to evacuate low molecule gases such as H2, He.


Contact us for more product information and specifications.


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