Oil Diffusion Ejector Pump

ULK Series


ULK series oil diffusion pump is a compact high vacuum pump designed with high critical back pressure.

It is used in a wide range of applications from research to manufacturing lines.

ULVOIL D-11 is hydrocarbon-based general-purpose oil.
ULVOIL D-31 is the silicon-based diffusion pump oil which heat-resistant stability is high in.


Designed for large critical back-pressure.

Extremely stable performance at pressures down to 10-2 Pa (10-4 torr).

Use hose flanges (except for vent flanges on ULK-04A and 06A).

Pumps can be cleaned easily (parts can be disassembled easily).

Come with mechanism to stop flow of operating fluid to auxiliary pump.


Contact us for more product information and specifications.


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