Ultimate pressure in the 10^-9 Pa order (achieved with test done complying with ISO standards).

Double the pumping performance achieved by the inert gas-enhanced pumping model (type AU), compared with the ULVAC's conventional pumps.

Ultra-high vacuum attained by high pumping speed.

Pumping down to ultra-high vacuum in a short period of time.

Top-notch pumping characteristics in ultra and extremely-high vacuum (discharging maintained down to the ultra-high vacuum)

Accelerators.

Electron microscopes.

Analyzers.