ULVAC CRYOGENICS
Cryo Pump
CRYO-U Series
CRYO-U4H CRYO-U6H CRYO-U8H CRYO-U8H-U CRYO-U8HL CRYO-U8HSP CRYO-U10H CRYO-U10HSP CRYO-U12H CRYO-U12HL CRYO-U12HSP CRYO-U16 CRYO-U16P CRYO-U20P CRYO-U20H CRYO-U22P CRYO-U22WB CRYO-U22H CRYO-U30H
CRYO-U4H
CRYO-U6H
CRYO-U8H
CRYO-U8H-U
CRYO-U8HSP
CRYO-U10H
CRYO-U12H
CRYO-U16
CRYO-U20P
CRYO-U22H
CRYO-U30H
CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and it is capable of high vacuum pumping.
A wide range of products from small to large-type are available according to the applications including Flat Panel Display, semiconductors, electronic equipment, optics and R&D.