ULVAC manufactures and sells IGZO targets, which are used in IGZO TAOS (Transparent Amorphous Oxide Semiconductors in which In, Ga, Zn, and O are used). ULVAC is working to increase the density of the target and reduce the number of partitions to restrict particles while delivering total packages, including high-quality IGZO targets, sputtering systems, and processes for IGZO to most display manufacturers around the world.
ULVAC also succeeded in developing a large IGZO target, which is about three meters long. This large IGZO target is expected to provide a fundamental solution to the degradation of TFT properties.
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