A complete line-up includes a research system for materials development, a cluster system for low-volume production, and an in-line system for mass production.
The line-up supports a complete range of organic EL applications, with systems for micro-molecular materials and systems for macro-molecular organic materials.
SOLCIET |
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Solciet is a system for use in research, that performs all processes through checking of material device configuration. |
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It has an independent chamber configuration including a pre-processing chamber, organic deposition chamber, electrode deposition chamber/intermediate chamber, and glove box. |
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A wide array of options are available to increase the range of research applications, including source units and sputter cathodes. |
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Solciet supports substrates of 100 mm in diameter as the standard substrate size. |
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SATELLA |
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To solve problems in organic deposition processes, Satella has multiple independent chamber configurations. |
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It can be used for full-color device production, a difficult application for Solciet. |
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It has a 7-sided transfer chamber and can support 2 to 4 organic deposition chambers as needed. |
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It comes with a high-precision mask alignment mechanism for active-matrix full-color devices. |
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It supports substrates of 200 mm in diameter as the standard substrate size. |
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NEW-ZELDA |
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New-Zelda is a system for prototype and panel mass production. |
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It comes with a new evaporation source, and a wide range of other applications are available for it. |
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It supports substrates of 400 x 500 mm as the standard substrate size. |
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Organic EL displays. |
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Contact us for more product information and specifications.