The SMD Series are single-substrate sputtering systems for the deposition of films such as metal films and ITO films.
ULVAC has delivered a large number of these systems for use in a wide range of production environments. ULVAC responds rapidly to feedback from production sites to improve the reliability of these models.
Substrate-only transfer and side deposition methods enable low particle generation. |
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Space-saving design. |
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Individual substrates can easily be managed using parameters such as deposition conditions. |
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Different cathodes are available for the deposition of different substances. |
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A wide range of deposition processes are supported, based on ULVAC's abundant experience and data. |
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Thin-Film Transistors (TFTs). |
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Contact us for more product information and specifications.