Single-substrate Sputtering System

SMD Series

The SMD Series are single-substrate sputtering systems for the deposition of films such as metal films and ITO films.

ULVAC has delivered a large number of these systems for use in a wide range of production environments. ULVAC responds rapidly to feedback from production sites to improve the reliability of these models.


Substrate-only transfer and side deposition methods enable low particle generation.

Space-saving design.

Individual substrates can easily be managed using parameters such as deposition conditions.

Different cathodes are available for the deposition of different substances.

A wide range of deposition processes are supported, based on ULVAC's abundant experience and data.



Thin-Film Transistors (TFTs).


Contact us for more product information and specifications.


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