Horizontal In-line Type Sputtering System

SCH Series

The SCH Series are horizontal in-line sputtering systems for the deposition of transparent conductive films and other metal films.

They can be used to deposit films such as back contact and barrier layers in solar cell production lines.


Demonstrated high reliability in many mass-production lines.

Flexibility in size and number of substrates.

High deposition rate & high-efficiency cathode.

Applicable to a broad range of deposition methods (Depo-down/Depo-up, DC/AC/RF sputtering).

Simple and easy maintenance.



Transparent conductive, back contact, precursor and buffer layer for solar cells.


Contact us for more product information and specifications.


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