SV-4540, 6040 and 9045 are carousel types that can load a large volume of substrates. They are ideal for small to medium-scale production or for low-volume production of many different substrate types.

SV-200 is a system specialized for disk stamper Ni deposition. It features an ultra-compact design, fully-automatic operation and high throughput.

Deposition of electrode films, insulating films or dielectric films on various substrates.