Sputtering System Batch-Type

SV Series

Vertical batch-type sputter systems. Series models include the SV-200 disk stamper model and carousel types for large-volume substrate processing.


SV-4540, 6040 and 9045 are carousel types that can load a large volume of substrates. They are ideal for small to medium-scale production or for low-volume production of many different substrate types.

SV-200 is a system specialized for disk stamper Ni deposition. It features an ultra-compact design, fully-automatic operation and high throughput.



Deposition of electrode films, insulating films or dielectric films on various substrates.


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