Turbo Molecular Pump -
UTM-HF/FW Series

ULVAC Turbo Molecular Pump - UTM-HF/FW Series

The UTM-FH and UTM-FW is compound turbo molecular using 5-axis Magnetic Levitation and Digital-Controlled and realized advantages such as high performance and reliability and energy savings.

The UTM-FH series, which has improved compression ratio for hydrogen, is high back pressure and high compression type and for light to middle processes. The UTM-FW series is wide range and high flow type and for high load process and middle to hard processes.

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