DIS-252

Double wrap type scroll pump which consists of 1 orbiting and 2 fixed scrolls.

Operation from atmospheric pressure is possible.

High ultimate pressure level is attainable.

Low vibration and noise.

Maintenance cycle can be controlled by hour meter.

DIS-90 DIS-501

Compact size with large displacement.

The highest level of ultimate pressure for dry vacuum pumps.

Safety design with built-in automatic reset type thermal protector (for single phase).

Suppresses moisture condensation by air flush.

DISL-102 DISL-503

Compact size with large displacement.

Vacuum pump resistant to high humidity gas.

Suppresses moisture condensation by air flush.

DISL-102

Safety design with built-in automatic reset type thermal protector.

DIS-90 DIS-501

Analytical equipment.

Gas recovery system.

Coating equipment.

Back pump for TMP (Turbo Molecular Pump).

Helium leak detector.

Manufacturing process for semiconductor.

DISL-102 DISL-503

Pick and transfer system.

Cleaning and drying.

Degassing / deforming.

Packaging.