High efficiency (IE3) multiple voltage motor fully developed by ULVAC.
A single motor can cover a wide range of voltage, 200 to 240V / 380 to 460V.

Forced oil circulation system.
Pumping speed is stable even around atmospheric pressure. It is suitable for repeat and continuous running between atmospheric pressure and vacuum.

Various options are available for special application.
3 types, type A, B and H, are available in addition to the standard type for special applications.

Evaporation, sputtering and ion plating.

Analytical instrument and leak test system.

Gas exchange, liquid filling.

Vacuum dry, freeze dry, vacuum deaeration and vacuum insulation.

Vacuum chuck and vacuum molding.

Other vacuum equipment.