Small in size but with high exhaust speed.

Compact size suitable for device integration.

The magnet coupling structure eliminates oil leakage from the shaft seal and achieves long life.

There is no oil contamination in the vacuum chamber due to the installation of the check valve directly below the intake pipe.

Low noise and low vibration.

Corresponds to the diversification of power cord by power cord inlet and outlet.

The exhaust speed is stable due to the installation of the forced oil supply mechanism.

Operation from atmospheric pressure is possible.

Easy connection with flanged parts and connection by knock pins on internal parts.