Reach performance equivalent to dry and oil rotary pump.

It can operate in all pressure zones from atmospheric pressure to reach.

Strong against water vapor.

No need for cooling water.

Supports single-phase / three-phase power supply with one model.

Long service life without sliding parts.

Analytical equipment.

Gas recovery system.

Coating equipment.

Back pump for TMP.

Helium leak detector.

Manufacturing process for semiconductors.