Multi-Stage Roots Type Dry Vacuum Pump

LR Series

LR60 LR90 LR180 LR421 LR421-T LR300 LR600 LR1200 LR1800 LR3601 LR3601-T(TT) LR3601-R LR3601-TR(TTR)

ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes.

ULVAC has focused the design efforts on maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and etch applications.

ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.


The LR series pump is designed for either Load Lock or PVD processes.

Excellent helium pumping capability : Canned motor for safety and ease of maintenance.

Power failure protection : Pump withstands power interruptions of up to 1000ms duration.

Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when exposed to corrosive gasses.

Pump data including warnings and alarms are able to be exported. Extensive pump control is available.

CE marking is available upon request.



Pump is designed for CVD or dry etching applications / designed for PVD, evaporation, or heat treatment processes / designed to handle process gasses that generate powder by-products such as Si crystal growing furnaces


Contact us for more product information and specifications.


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