Multi-Stage Roots Type Dry Vacuum Pump

HR/UR Series

HR60 HR90 HR300 HR600 HR1200 UR421-T UR600 UR1200 UR1800 UR3601-TT

ULVAC's unique approach to utilize the generated heat from within the dry pump body allows the LR/HR/UR series to perform even in the most stringent processes.

ULVAC has focused the design efforts on maintaining an extremely uniform high temperature throughout all pump stages making this series pump optimal for CVD and etch applications.

ULVAC's ECO-SHOCK can be added to the LR pump for additional energy savings of up to 70% for any light processes including pumping air or nitrogen.


The HR series pump is designed for CVD and etch processes.

The UR series pump is designed for applications that require a heated pump, heated gas lines, and/or heated exhaust lines.

Excellent helium pumping capability : Canned motor for safety and ease of maintenance.

Power failure protection : Pump withstands power interruptions of up to 1000ms duration.

Internal components are specially treated providing a high degree of surface hardness and corrosion resistance. This prevents wear and corrosion of internal pump parts when exposed to corrosive gasses.

Pump data including warnings and alarms are able to be exported. Extensive pump control is available.

CE marking is available upon request.



Pump is designed for CVD or dry etching applications / designed for PVD, evaporation, or heat treatment processes / designed to handle process gasses that generate powder by-products such as Si crystal growing furnaces


Contact us for more product information and specifications.


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