Mechanical Booster Pump -
PRC Series

ULVAC Mechanical Booster Pump - PRC Series

By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10 kPa to 0.1 Pa, where roughing pump pumping speed drops.

The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.

Select the Drawing Format