Diaphragm Type Dry Vacuum Pump

DA / DAP / DAT Series 2nd Stage Type

DA-20D DA-30D DA-41D DA-60D DA-121D DAP-6D DAP-9D-DC24 DAT-50D

DA-20D DA-30D DA-41D DA-60D DA-121D
Standard type / Two-stages / with power cord / with switch / with thermal protector

Single-stage / with cord and switch / with thermal protector

Two-stage / DC motor equipped / with interlock protection / with overcurrent protection

Two-stage / with power cord / with thermal protector


A standard type of dry vacuum pump with abundant results and low price.

Dry vacuum pump using no oil in the gas contact area.

Rich lineup available to suit your application.

The two-stage exhaust system has lower pressure (good vacuum) than the one-stage exhaust system.

Safety design with built-in automatic reset type thermal protector.

Operation is possible from atmospheric pressure.

Simple structure and easy maintenance.


By incorporating an unloader valve (Option), air can be introduced into the pump when the pump is stopped, and the pump startup characteristics can be improved.


The built-in balance port enables restart from a vacuum condition.


Since the unloader valve is built in, it is possible to restart from the vacuum state.


The built-in balance port enables restart from a vacuum condition.



Vacuum chucks, wafers and tip-handling devices.

Vacuum tweezers, medical appliances.

Printing equipment.

Automatic packing machines.

Optical appliances.

DA-30D DA-121D DAT-50D

Semiconductor industry.

DA-30D DAT-50D

Injection molding machine.




Contact us for more product information and specifications.


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