G-TRAN series SC1 is a magnetron type cold cathode vacuum gauge.
Since no filament is used, extended life between gauge replacement is assured.
Ease of maintenance reduces the cost of ownership.
Corrosion-resistant platinum is used for the filament material. |
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Able to output 2 set points. |
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Pressure reading is a 0 to 5V output (non-linear). |
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Able to operate at 24VDC power input |
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Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing. |
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Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc. |
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Process control in the low-pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment. |
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