Pirani Vacuum Gauge
Transducer Type


The sensor unit SP1 is an integrated Pirani gauge consisting of the WP series sensor head and circuits, for the range of 3000 to 0.4 Pa (22 to 3 x 10-3 torr / 3 to 4 x 10-3 mbar).


Corrosion-resistant platinum is used for the filament material.

Able to output 2 set points.

Pressure reading is a 0 to 5V output (non-linear).

Able to operate at 24VDC power input



Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing.

Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.

Process control in the low-pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.


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