Hot Cathode Gauge
Transducer Type

SH200 Series

SH200-A SH200-R SH200-E

New series of transducer type "G-RTAN series Multi Ionization Gauge" that is capable of connecting to different types of sensor heads.

This product, which is a "B-A" (Bayard-Alpert) type ionization gauge, can measure ultra-high vacuum.

Improved to be more user-friendly taking over the concept of long-life and low running cost.


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Easy setpoint setting, condition check, etc. by connecting PC/Android.

Filament life notification function. An advance warning can be made before the life of the ionization vacuum gauge by watching filament power.

Capable of connecting different measurement range sensor heads according to applications.

Significantly miniaturized compared to the previous series (56% reduction of controller volume).

EtherCAT specs are to be available in addition to analog output specs and serial communication specs.

Measurement from atmospheric pressure to ultra-high vacuum (1 x 10+5 to 5 x 10-8 Pa) is possible (when using an optional unit SWU10-R).

Precise atmospheric pressure check for chamber open is available (when using with an optional unit SAU).



Process control in high vacuum range for vacuum equipment for semiconductors or electric devices.

Ultimate pressure check for in-line or batch-type vacuum equipment which has many process chambers.

Pressure measurement for high vacuum or ultra-high vacuum equipment.


Contact us for more product information and specifications.


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