Vacuum Transfer Robot

NCH Series

NCH series is vacuum transfer platform that combines robot, core chamber and load lock.


Connection port can be broadly chosen from 4 (quadrangle) to a maximum of 8 (octagon).

Load lock chamber corresponding to 25 slot wafer cassette is equipped standardly.

Vacuum pumps and vacuum gauges are options.



Automatic wafer transfer for various semiconductor equipment.

Wafer transfer for various vacuum equipment for R&D.


Contact us for more product information and specifications.


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