COVOT

Offers a variety of arms with various strokes, number of hands and turning radii.

Enable to use in the high vacuum (10^-6Pa).

COVOT-LC

Simple 2-axis robot without the Z-axis.

Built-in controller enables compact equipment layout.

Corresponds to the high vacuum to 10^-5Pa.

COVOT-6

Independent arms are equipped, two substrates can be exchanged simultaneously.

7-axis actuators and enables teaching to each of the 4 arms.

Corresponds to the medium vacuum to 10^-1Pa.

ELEC-RZ

Magnetic fluid sealing is adopted as a vacuum seal, and it corresponds to the high vacuum to 10^-6Pa.

Achieved a compact design by miniaturizing the actuator enabling easy implementation to the equipment.

Offers a variety of arms with various strokes, number of hands and turning radii.

Achieved excellent operability by adopting the multi-function display teaching pendant.

Automatic wafer transfer for various semiconductor equipment.

Wafer transfer for various vacuum equipment for R&D.