Small Evaporation System VPC Series : ULVAC Singapore

Small Evaporation System

VPC Series

VPC-061 VPC-061A VPC-260F VPC-1100

VPC-061

VPC-061A

VPC-260F

VPC-1100

It is a high-speed type vacuum deposition system by the resistance heating formula which stored compactly required apparatus, such as an oil diffusion pump, an oil rotary vacuum pump, a Pirani gauge, valve piping, an electric system, and a pressure measurement port, in the mount, and has equipped with a bell jar, rise-and-fall equipment, etc.

It is ideal for an experiment, such as basic research development of large substrate sizes.

Features

VPC-061 VPC-061A
	Desktop type and compact size enable setup with space saving.
	The glass bell jar makes it easy to see the inside and has good control.
	It is possible to open the vacuum chamber without stopping the main pump.
VPC-260F VPC-1100
	Easy viewable through a glass bell jar and easy maintenance.
	The vacuum chamber can be opened without stopping the main pump.
	Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation are possible.
	It is an easy-moving vacuum pumping system with casters.

Our Business
Semiconductor Production Equipment
Electronic Device Production Equipment
Flat Panel Display Production Equipment
Industrial Equipment
Components
Materials

Products
Equipment
Components
Materials

News
Vacuum Magazine
About Us
Support
Contact Us