Uses a high-efficiency amplifier. Energy savings through construction with an RF circuit featuring good power conversion efficiency.

Implements high-speed auto-matching with a high-speed algorithm.

RF power generator internally equipped with an auto-matching function.

Matching system control is possible with the power generator unit itself. Also capable of manual RF power generator and matching box operations with the internal controller.

Capable of external analog and serial communication control.

High reliability. Our accumulated knowledge as an equipment manufacturer has been reflected in the design.

Sputtering and CVD equipment.

Plasma etching equipment.

RF Ion Source and Neutralizer.