High Speed Spectroscopic Ellipsometer
Built-in Type

UNECS Series


UNECS-1M, the lightweight and compact design sensor head, is capable to be integrated into various equipment.

It is suitable for both vacuum and atmospheric pressure environments.


High-speed Measurement :
The snapshot measurement method is realized and the high-speed measurement is 20 ms per point.

Visible Spectral Range :
The spectral wavelength range can be selected. The standard type is 530 nm to 750 nm and the visible spectral type is 380 nm ~ 760 nm.

Compact Sensor Unit :
The sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for periodic maintenance.

Strong Product-line :
There is a strong product line with the portable type, the manual/automatic stage type, the built-in type and the large substrate type.



Measurement for transparent or semi-transparent thin films thickness(D), reflective index(N) and extinction coefficient(K). (Oxide film, nitride film, photo-resist film, ITO film, etc.)


Contact us for more product information and specifications.


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