Automatic Stage Type with Mapping Function.
3 models are available for Ø150, 200 and 300 mm samples.
Auto mapping R-θ stage and autofocus function make it possible to measure the film thickness of the entire sample surface and display film thickness distribution by color map.
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High-speed Measurement : |
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Visible Spectral Range : |
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Compact Sensor Unit : |
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Strong Product-line : |
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Measurement for transparent or semi-transparent thin films thickness(D), reflective index(N) and extinction coefficient(K). (Oxide film, nitride film, photo-resist film, ITO film, etc.) |
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