High Speed Spectroscopic Ellipsometer
Automatic Type

UNECS Series


Automatic Stage Type with Mapping Function.

3 models are available for Ø150, 200 and 300 mm samples.

Auto mapping R-θ stage and autofocus function make it possible to measure the film thickness of the entire sample surface and display film thickness distribution by color map.


Select a video from the playlist.


High-speed Measurement :
The snapshot measurement method is realized and the high-speed measurement is 20 ms per point.

Visible Spectral Range :
The spectral wavelength range can be selected. The standard type is 530 nm to 750 nm and the visible spectral type is 380 nm ~ 760 nm.

Compact Sensor Unit :
The sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for periodic maintenance.

Strong Product-line :
There is a strong product line with the portable type, the manual/automatic stage type, the built-in type and the large substrate type.



Measurement for transparent or semi-transparent thin films thickness(D), reflective index(N) and extinction coefficient(K). (Oxide film, nitride film, photo-resist film, ITO film, etc.)


Contact us for more product information and specifications.


2024 ULVAC Singapore Pte Ltd. All rights reserved.