EB Source for Metal Film

EGN Series

EGN-206M EGN-406M

EGN series is the easy maintenance electron beam evaporation source for metal evaporation which has a flat top configuration without any structural object on the evaporating side of the metal material newly developed in consideration of maintainability.


Flat Top Structure. Easy cleaning because of less coated areas on the evaporation source of the electron beam.

Easy assembly by reducing parts to 60% compared with conventional units.

Water-cooling structure for the entire crucible side surface. Less contamination from the crucible to evaporation material compared with the one with only bottom side cooling.

Most suitable beam form is selectable, either ribbon form for metal evaporation or spot beam form for oxide and compound evaporation.

Design based on long-time experience as a vacuum process equipment manufacturer.

Two Locating Faces Configuration. All parts to be removed and installed during maintenance are fixed by two locating faces.



Evaporation source for electron beam evaporation.


Contact us for more product information and specifications.


2024 ULVAC Singapore Pte Ltd. All rights reserved.