Forced air-cooling, requires no cooling water.

High reliability. Our accumulated knowledge as an equipment manufacturer has been reflected in the design.

The LCD touch panel used for the control panel improves ease of use.

Sweep waveform variations. Many beam scan forms can be created on the operating screen.

Configured with a circuit that minimizes decreases in deposition rate by high-speed arc shutoff.

Low-level arc control function (option for optical applications). Controls minute arcs that occur in optical applications to allow stable deposition.

Vacuum evaporation for metal films.