Deposition Controller CRTM-R1 Series : ULVAC Singapore

Deposition Controller

CRTM-R1 Series

CRTM-R1 CRTM-R1-EL

CRTM-R1

CRTM-R1-EL

CRTM-R1
ULVAC has developed new quartz crystal deposition controllers based on our long-time experience and technologies.
Contributes to improved quality and reliability in vapor deposition processes.

CRTM-R1-EL
CRTM-R1-EL is a crystal deposition monitor optimized for the organic EL deposition process.
New measurement method provides excellent resolution and rate stability.

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Quartz Crystal type Deposition Controller CRTM-R1

Features

	Excellent rate stability and resolution make it suitable for low-rate control.
	Ability value (CI value) measurement function improves crystal anomaly detection.
	Simultaneous vapor deposition control of up to 8 sources is possible. (add option)
	Communication method supports Ethernet and RS-232C.
	Various log data can be saved. Data can be transferred to USB and analyzed on a PC.

Applications

CRTM-R1
	Thickness and rate control for vapor deposition of metal thin film or optical thin film
CRTM-R1-EL
	Film thickness and rate monitoring in OLED deposition process.

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