DC Power Supply
Bipolar Unit for Dual Cathode

MFU Series


MFU-20K is a unit which converts the DC output into bipolar pulse output, by adding to the ULVAC DC power generator. It contributes to improved productivity and throughput at low cost.


Wide frequency range. Can be operated from 10 k ~ 100 kHz. The frequency is subject to a limit at a voltage of more than 800V.

Enables the larger capacity by a master/slave connection. Parallel operation of a maximum of six MFU-20K is possible.

It is possible to apply an output of an input DC power generator to a cathode directly. The output is subject to a limit at a frequency of more than 60kHz.



Reactive sputtering equipment for Flat Panel Display.

Reactive sputtering equipment for industrial coating.

Reactive sputtering equipment for color TFT.

All sputtering equipment.


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