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Sputtering System
Sputtering System
ULVAC's sputtering systems have the best track record in the industry.
Load-lock Type
Multi-chamber Sputtering System ENTRON™-EX W300
Multi-chamber Sputtering System MLX™-3000N
Sputtering System for Optical Filters and Coating ULDiS Series
Backside Metalization Sputtering System SRH Series
Cluster-type Sputtering System SME-200E
Load-lock Type Sputtering System CS-200
Combined Deposition and Etch modules System uGmni-200, 300
Batch-type
Sputtering System Batch-Type SV Series
In-line Type
Single-substrate Sputtering System SMD Series
Horizontal In-line Type Sputtering System SCH Series
Roll Coater Type
Sputtering Coating Machine SPW Series
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