ULVAC vacuum pumps are developed based on abundant technology and experience in the vacuum field. We have a lineup of vacuum pumps for all areas, conditions, and applications such as Turbo Molecular Pumps, Cryopumps and Sputter Ion Pumps.
Cryo Pump |
Super Trap |
Turbo Molecular Pump |
Ion Pump |
Oil Diffusion Ejector Pump |
Vacuum Pumping System |