Power Device

Multi-chamber Sputtering System MLX™ -3000N Backside Metalization Sputtering System SRH Series Cluster-type Sputtering System SME-200E Load-lock Type Sputtering System CS-200


Ashing Systems Luminous NA Series


High-Density Plasma Etching System for R&D NE-550EX Dry Etching System for Production NE-5700 / NE-7800 Dry Etching System for R&D NLD-570 Dry Etching System for Opto-Devices, MEMS NLD-5700


Medium Current Ion Implanter SOPHI-200/260 High-energy Ion Implanter SOPHI-400 High-temp Ion Implanter for SiC IH-860DSIC


Backside Metalization Sputtering System SRH Series Cluster-type Sputtering System SME-200E Load-lock Type Sputtering System CS-200


Batch-type High Vacuum Evaporation System ei Series


Low-acceleration and High-density Ion Implanter SOPHI-30 Medium Current Ion Implanter SOPHI-200/260 High-energy Ion Implanter SOPHI-400


Combined Deposition and Etch modules System uGmni-200, 300